I. Course Introduction

The aim of this course is to systematically introduce the structures, material properties, fabrication technologies, characterization techniques, and applications of materials related to microelectronics. Topics include advanced semiconductor materials, dielectric materials, metallization interconnect materials, packaging materials, as well as micro- and nano-materials at the forefront of scientific research. The course will be supported by images, charts, and detailed data, and is designed for graduate students preparing to engage in research on materials and devices.

In the experimental section of this course, students will fabricate three cutting-edge devices: thin-film transistors (TFTs), solar cells (SCs), and electroluminescent (EL) devices, using organic, inorganic, and hybrid organic/inorganic materials. Students will learn to operate a variety of equipment and understand their working principles through hands-on practice. After fabrication, students will also measure and analyze the characteristics of these devices. By completing this course, students will acquire foundational knowledge of materials and devices, practical skills in device fabrication, and competence in device measurement methods through both lectures and laboratory experiments.

II. References

[1] S.O. Kasap, Principles of Electronic Materials and Devices (3rd Edition), McGraw-Hill, 2016. Dieter K. Schroder, Semiconductor Material and Device Characterization, John Wiley & Sons.

[2] Chen Lijun, Microelectronic Materials and Processes, Fudan University Press, 2005.

[3] S.M. Sze, Semiconductor Devices: Physics and Technology, John Wiley & Sons, 1985.